XYZ GANTRY
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Applications: AOI
Assembly: Automated Optical Inspection Gantry
Industry: Semiconductor
Description
• High accuracy and rigidity gantry
• Used for optical inspection
• Enable measurement for FOV (Field of View) that can be automatically combined into one continuous image data for accurate position precision
• Uses Iron Core Linear Motor
• Features very high force output
• Compact design
• High structural rigidity
• Low cogging force
• Large air gap for easy installation
Specifications
Accuracy
Repeatability
Speed
Position error below 8 counts
Assembly: Automated Optical Inspection Gantry
Industry: Semiconductor
Description
• High accuracy and rigidity gantry
• Used for optical inspection
• Enable measurement for FOV (Field of View) that can be automatically combined into one continuous image data for accurate position precision
• Uses Iron Core Linear Motor
• Features very high force output
• Compact design
• High structural rigidity
• Low cogging force
• Large air gap for easy installation
Specifications
Accuracy
Repeatability
Speed
Position error below 8 counts
